Abstract:

This paper presents the comprehensive study of the Piezoresistive micro pressure sensor and different technique for optimization for enhancing its performance. Its different properties are of high sensitivity, high linear input/output relationship, and small size of in dimensions in micrometer are more demand in most of the industries. It used as a commercial sensing element in different sensors. The dimensions of piezo resistive micropressuresensors are highly compatible with the dimensions of biological, chemical species and other fields and hence make it more efficient and reliable to measure their properties. It has very interesting properties and also is a very good piezoresistors having high Piezoresistance co-efficient. In this paper a overview of the piezoresistive micropressure sensors development, properties, typical dimension, performance enhancement and applications are reviewed. The future of piezoresistive micropressure sensor is very bright and has wide range of impending applications due large operating pressure range.

Description:

MEMS, Pressure sensor, Piezoresistance, SOI, SiC, DLC, CNT.